ASTM D5127-13(2018)
- Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
- standard by ASTM International, 10/15/2018
- Category: ASTM
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1.1 This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Seven classifications of water are described, including water for line widths as low as 0.032 μm. In all cases, the recommendations are for water at the point of distribution (POD).
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