IEST RP-CC024.1
- Measuring & Reporting Vibration in Microelectronic Facilities
- Recommended Practice by Institute of Environmental Sciences and
- Category: IEST
$245.00
$123.00
Equipment used in the manufacture, measurement, and inspection of integrated circuits is sensitive to vibration and sound. It is therefore necessary to establish levels of vibration sensitivity for them and to ensure that vibrations occurring in the facility or at the site at which they are located are below those levels. This RP is intended to provide guidance in the microelectronics industry. It may also be applicable in pharmaceutical and biological research, metrology laboratories, and other contexts in which vibration control is important.
PDF
All of our standards document are available in PDF (Portable Document Format), an electronic, downloadable format.You will be able to download the file in your account downloads.
Multi-User Access
After purchasing, you have the ability to assign each license to a specific user.
Printable
At any time, you are permitted to make printed copies for your and your members' reference use.
